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Colorless Excimer Laser Gas

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Colorless Excimer Laser Gas

China Colorless Excimer Laser Gas supplier
Colorless Excimer Laser Gas supplier Colorless Excimer Laser Gas supplier

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Product Details:

Place of Origin: China
Brand Name: Newradar
Certification: ISO/DOT/GB
Model Number: N/A

Payment & Shipping Terms:

Minimum Order Quantity: 1pcs
Price: negotiation
Packaging Details: Packed in10L-50L cylinder or packed according to the demands.
Delivery Time: 25 working days after received your payment
Payment Terms: L/C, , T/T, Western Union, MoneyGram
Supply Ability: 500 pcs per month
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Detailed Product Description
Product Name: Argon Fluoride Mixtures Filling Gas: Argon, Neon And Fluorine Gas Mixtures
Valve Type: CGA679 Application: Excimer Lasers
Contents: 2000-7500L Molar Mass: 59.954 G/mol

Excimer Laser Gas Argon Fluoride ArF Price Mixtures Packed in 1L - 50L Cylinders




An argon fluoride laser absorbs energy from a source, causing the argon gas to react with the fluorine gas producing argon monofluoride, a temporary complex, in an excited energy state:
2 Ar + F2 → 2 ArF


The complex can undergo spontaneous or stimulated emission, reducing its energy state to a metastable, but highly repulsive ground state. The ground state complex quickly dissociates into unbound atoms:
2 ArF → 2 Ar + F2


The result is an exciplex laser that radiates energy at 193 nm, which lies in the far ultraviolet portion of the spectrum, corresponding with the energy difference of 6.4 electron volts between the ground state and the excited state of the complex.


The light emitted by the ArF is invisible to the human eye, so additional safety precautions are necessary when working with this laser to avoid stray beams. Gloves are needed to protect the flesh from the potentiallycarcinogenic properties of the UV beam, and UV goggles are needed to protect the eyes.




1. Physical properties


Commodity Argon Fluoride gas
Molecular Formula ArF
Phase Gas


Hazardous class for transort 2.2


2. Typical technical data (COA)


Major Components
Fluorine 1.0% 0.9-1.0%
Argon 3.5% 3.4-3.6%
Neon Balance  
Maxinum Impurities
Carbon Dioxide (CO2) <5.0
Carbon Monoxide (CO) <1.0
Carbon Tetrafluoride (CF4) <2.0
Carbonyl Fluoride (COF2) <2.0
Helium (He) <8.0
Moisture (H2O) <25.0
Nitrogen (N2) <25.0
Nitrogen Trifluoride (NF3) <1.0
Oxygen (O2) <25.0
Silicon Tetrafluoride (SiF4) <2.0
Sulfur Hexafluoride (SF6) <1.0
THC (as Methane) (CH4) <1.0
Xenon (Xe) <10.0


3. Package


Cylinder Specifications Contents Pressure
Cylinder Valve Outlet Options Cubic Feet Liters PSIG BAR
1 CGA679 DISS 728 265 7500 2000 139
2 CGA679 DISS 728 212 6000 2000 139
3 CGA679 DISS 728 71 2000 1800 125




Argon Fluoride Mixtures are used in 193 nm lithography applications, usually in conjunction with an inert gas mixture.


Colorless Excimer Laser Gas

Contact Details
Wuhan Newradar Special Gas Co.,Ltd

Contact Person: vicky Liu

Tel: +8613667126861

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