Nitrogen fluoride NF3, nf3 gas

Basic Information
Place of Origin: CHINA
Brand Name: Newradar
Certification: ISO
Model Number: N/A
Minimum Order Quantity: 1 cylinder
Price: negotiation
Packaging Details: 30kgs/48.8L
Delivery Time: 15-20 working days
Payment Terms: T/T
Supply Ability: 200 pcs/month
Detail Information
Purity: 99.99%-99.996% Standard: DOT
Name: Nitrogen Fluoride Valve: CGA/DISS640
Working Pressure: 9.0-13.0Mpa EINECS No: 200-896-5
Appearance:: Colorless Place Of Origin: Wuhan China
Other Name: NF3 Certification: C S A

Product Description

Nitrogen fluoride NF3, nf3 gas

Product Description

Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics.



Nitrogen trifluoride is used in the plasma etching of silicon wafers. Today nitrogen trifluoride is predominantly employed in the cleaning of the PECVD chambers in the high-volume production of liquid-crystal displays and silicon-based thin-film solar cells. In these applications NF3 is initially broken down in situ by a plasma.




1. Physical properties


Product Name Nitrogen Trifluoride
Molecular Formula NF3
UN No. UN 2451
CAS No. 7783-54-2
EINECS No. 232-007-1


2. Typical technical data


Item Unit Index
NF3 Vol.% ≥ 99.995 99.99
CF4 Vol.% ≤ ≤20 ≤40
N2 Vol.% ≤ ≤5 ≤10
O2+Ar Vol.% ≤ ≤3 ≤5
CO Vol.% ≤ ≤1 ≤5
CO2 Vol.% ≤ ≤1 ≤5
N2O Vol.% ≤ ≤1 ≤5
SF6 Vol.% ≤ ≤2 ≤5
H2O Vol.% ≤ ≤3 ≤1


Packaging & Shipping

Packaging & Shipping.jpg DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder




Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.


Our Certificate

Nitrogen fluoride NF3, nf3 gas 2

Our Services


Company Information



1. What's your product price?

Because each gas price is depends on the market supply and demand, quantity and purity, it is difficult to give a fixed price. If you have any interested in each gas, pls give your details requirement. I could like to make an offer to you.

2. What’s the min order?

Different products have different min order. Please don’t hesitate to let me know your requirement.

3. What’s the delivery time?

If the cylinder is in the stock, and only need to fill gas, the delivery is about 7-10 days ex work after receive the deposit.

If the cylinder need to customize, the delivery is about 15-35 days ex work after receive the deposit. That is depends on the quantity.

4. How to check the gas quality?

Firstly, our cylinder will take a treatment (cleaning, drying, vacuum pumping, and replacement before filling gas. In this way, the cylinder inside is clear and dry. Secondly, we will take tests every treated cylinder to assure them inside purity. Thirdly, we will take a test for all of the gas after fill into cylinders. If the tested gas is not up to standard, we will produce it again and not release the faulty product to ex work. At last, we will supply you the gas test qualified report .

5. All the cylinders can recycle?

Usually seamless steel cylinder can recycle to use in 20 years. The disposable cylinder is only for use one time.

6. Shall we send back the cylinders to China to refill gas again?

Yes, when you ordered our cylinders, next time, you can send back the cylinders to fill gas again. You just need to tell us before you export. We will handle all the import customs clearance formalities.


contact infor

Contact person: Cindy


Wechat: Gas3381 Wechat: 18602768623

Moblie: +86 136 6712 6861 +86 18602768623 +86 159 2735 8762

Fax: +86 27 82653381

Contact Details

Phone Number : 0086-27-87819318