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CAS 76-16-4 Halocarbon 116

China CAS 76-16-4 Halocarbon 116 supplier

Large Image :  CAS 76-16-4 Halocarbon 116

Product Details:

Place of Origin: China
Brand Name: newradar
Certification: ISO/DOT/GB
Model Number: N/A

Payment & Shipping Terms:

Minimum Order Quantity: 1000 kilogram
Price: negotiation
Packaging Details: standard export packing:each cylinder to be protected by two poly-nets,standing on wooden pallet wrapped by plastic film
Delivery Time: 15-25 working days after received your payment
Payment Terms: L/C, , T/T, Western Union, MoneyGram
Supply Ability: 3,00 ton per month
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Detailed Product Description
CAS No.: 76-16-4 EINECS No.:: 200-939-8
RIDADR: UN 2193 2.2 Other Names: Carbon Hexafluoride, 1,1,1,2,2,2-Hexafluoroethane, Perfluoroethane, Ethforane, Halocarbon 116, PFC-116, CFC-116, R-116, Arcton 116, Halon 2600
Appearance:: Colorless Liquefied Gas UN NO.: 2193
Grade Standard: Electron Grade Industrial Grade Synonyms: 1,1,1,2,2,2-Hexafluoroethane;C2F6;ethane,hexafluoro-;Ethylhexafluoride;f116;F-116;FC1160;Fluorocarbon 116
Application: Electronics Equipment,transformer,refrigerating Fluid MF:: C2F6
Mol File:: 76-16-4.mol

CAS 76164 Fluorocarbon 116 Halocarbon C2F6 Electronic Gases With Cylinder For Etchant In Semiconductor Manufacturing

 

Description:

 

Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon. The primary aluminum and the semiconductor manufacturing industries are the major emitters of hexafluoroethane.

 

Hexafluoroethane is relatively inert. The mixture is nonflammable and nontoxic, though asphyxiation may occur because of displacement of oxygen. Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket.

 

Hexafluoroethane is chemically inert in many situations, but can react violently with strong reducing agents such as the very active metals and the active metals. Can react with strong oxidizing agents or weaker oxidizing agents under extremes of temperature.

 

Vapors may cause dizziness or asphyxiation without warning. Vapors from liquefied gas are initially heavier than air and spread along ground. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire may produce irritating, corrosive and/or toxic gases.

 

Some may burn but none ignite readily. Containers may explode when heated. Ruptured cylinders may rocket.

 

 

Specifications:

 

1. Physical properties

 

Commodity

 Hexafluoroethane

Molecular Formula

 R116

CAS No

 76-16-4

UN No.

 

2193

 

Hazardous Class

 2.2

MF:

 C2F6

Cylinder Capacity

 40L, 500L

Filling Weight

 530kg/500L refillable cylinder

 20kg/40L refillable cylinder

Storage and Transportation

 Use, store and transport below 45C. Store in cool and well-ventilated areas. Keep away from fire, heat, sunlight and flammable substances. Handle carefully when loading and unloading to avoid damages to gas cylinders and accessories.

 

2. Typical technical data

 

Purity, % ≥99.8
Moisture, PPm ≤10
Acidity, PPm ≤1
Vapor Residue, PPm ≤100
Appearance Colorless, No turbid
Odor No Strange Stench

 

 

 

 

 

 

 

 

Molecular Weight 66.1
Boiling Point, °C -24.7
Critical Temperature, °C 113.5
Critical Pressure, Mpa 4.58
Specific Heat of Liquid, 30°C, [KJ/(kg°C)] 1.68
ODP 0
GWP 0.014

 

 

 

 

 

 

 

 

CAS 76-16-4 Halocarbon 116

Applications:

 

Multi - Functional Etching Technology In The Production Of Semiconductor
The Metal Substrate

It can be used in the selective etching of metal silicon metal and metal oxide.

Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket.

 

 

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