Detail Information

Application:	248nm Lithography Process And Mixed With Halogen Using Mixed Gases	CF4:	Tetrafluoromethane
UN No:	1982	Oxygen:	O2
Package::	Seamless Steel Cylinders	Other Names:	Oxygen Carbon Tetrafluoride Mixture
Appearance::	Colorless Gas	Cylinders Volume::	10L,25L, 40L Or 50L
Grade Standard:	Electron Grade Grade	Toxic:	Non-toxic
High Light:	air liquide specialty gases , special gases

Product Description

UHP Gas O2 And CF4 Specialty Gas Mixtures Oxygen With Tetrafluoromethane Mixture Manufacturer

Description:

Anisotropic etch.control. Other halocarbons, as well as the presence of air or oxygen, are detrimental to the control of theTetrafluoride results in superior control of the process, which results in better dimensional and profile. A higher purity Carbonor CF2conditions, the fluorine free radicals are typically in the form of CF3Carbon Tetrafluoride is relatively inert under normal conditions and is an asphyxiant. Under RF plasmaprocesses. Carbon Tetrafluoride is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride.Carbon Tetrafluoride is a source of fluorine or carbon fluoride free radicals used in a variety of wafer etch

Specifications:

1. Physical properties

Major Components
COMPONENTS	CONCENTRATION	RANGE
O2	20 %	19.9-20.1%
CF4	Balance

2. Typical technical data (COA)

Maximum Impurities
COMPONENTS	CONCENTRATION (ppm)
Carbon Dioxide (CO2)	<1.0
Carbon Monoxide (CO)	<1.0
Moisture (H2O)	<0.5
Nitrogen (N2)	<10.0
Oxygen (O2)	<5.0
THC (as Methane) (CH4)	<0.5
Other Halocarbons	<1.0
Sulphur Hexafluoride	<1.0

Cylinder Specifications*			Contents	Pressure
Cylinder	Valve Outlet Options		Pounds	PSIG	BAR
2	CGA 580	DISS 716	70	2000	139

Applications:

Tetrafluoromethane is sometimes used as a low temperature refrigerant.

It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.

It also has uses in neutron detectors

Tag:

Place of Origin:	China
Brand Name:	Newradar Gas
Certification:	ISO/DOT/GB
Model Number:	N/A

Minimum Order Quantity:	1000 liters
Price:	negotiation
Packaging Details:	10kg, 40kg or 50kg packed in the qualified gas cylinder or packed according to the demands
Delivery Time:	15-25 working days after received your payment
Payment Terms:	L/C, , T/T, Western Union, MoneyGram
Supply Ability:	3,00 cubic meter per month

UHP Gas O2 And CF4 Specialty Gas Mixtures Oxygen With Tetrafluoromethane Mixture Manufacturer

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