Detail Information

CAS No.:	7439-90-9	UN No:	1982
Purity::	99.999%	Package::	Seamless Steel Cylinders
Other Names:	Oxygen Carbon Tetrafluoride Mixture	Appearance::	Colorless Gas
Cylinders Volume::	10L,25L, 40L Or 50L	Grade Standard:	Electron Grade Grade
Toxic:	Non-toxic	Application:	248nm Lithography Process And Mixed With Halogen Using Mixed Gases
Highlight:	air products specialty gases , air liquide specialty gases

Product Description

Specialty Gas Mixtures 20% Oxygen With Carbon tetrafluoride CF4 Mixted O2 For etch polysilicon , and silicon dioxide

Description:

Specialty Gas Mixtures

Carbon Tetrafluoride is a source of fluorine or carbon fluoride free radicals used in a variety of wafer etchprocesses. Carbon Tetrafluoride is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride.

Carbon Tetrafluoride is relatively inert under normal conditions and is an asphyxiant. Under RF plasma conditions, the fluorine free radicals are typically in the form of CF3

or CF2. A higher purity CarbonTetrafluoride results in superior control of the process, which results in better dimensional and profile control.

Other halocarbons, as well as the presence of air or oxygen, are detrimental to the control of the anisotropic etch.

Specifications:

1. Physical properties

Major Components
COMPONENTS	CONCENTRATION	RANGE
O2	20 %	19.9-20.1%
CF4	Balance

2. Typical technical data (COA)

Maximum Impurities
COMPONENTS	CONCENTRATION (ppm)
Carbon Dioxide (CO2)	<1.0
Carbon Monoxide (CO)	<1.0
Moisture (H2O)	<0.5
Nitrogen (N2)	<10.0
Oxygen (O2)	<5.0
THC (as Methane) (CH4)	<0.5
Other Halocarbons	<1.0
Sulphur Hexafluoride	<1.0

Cylinder Specifications*			Contents	Pressure
Cylinder	Valve Outlet Options		Pounds	PSIG	BAR
2	CGA 580	DISS 716	70	2000	139

Colorless Specialty Gas Mixtures 0

Applications:

Tetrafluoromethane is sometimes used as a low temperature refrigerant.

It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for silicon, silicon dioxide, and silicon nitride.

It also has uses in neutron detectors

Tag:

Place of Origin:	China
Brand Name:	Newradar Gas
Certification:	ISO/DOT/GB
Model Number:	N/A

Minimum Order Quantity:	1000 liters
Price:	negotiation
Packaging Details:	10kg, 40kg or 50kg packed in the qualified gas cylinder or packed according to the demands
Delivery Time:	15-25 working days after received your payment
Payment Terms:	L/C, , T/T, Western Union, MoneyGram
Supply Ability:	3,00 cubic meter per month

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