Nitrogen Trifluoride NF3odorless Tasteless Colorless Gas For Semiconductor , DOT Listed

Basic Information
Place of Origin: China
Brand Name: Newradar Gas
Certification: ISO/DOT/GB
Model Number: N/A
Minimum Order Quantity: 1 pcs
Price: negotiation
Packaging Details: Packed in 10L-500L cylinder or packed according to the demands.
Delivery Time: 10-20 working days after received your payment
Payment Terms: L/C, , T/T, Western Union, MoneyGram
Supply Ability: 1000 pcs per month
Detail Information
Product Name: Nitrogen Trifluoride Density: 3.003 Kg/m3 (1 Atm, 15 °C)
Odor: Moldy Appearance: Colourless Gas
CAS No.: 7783-54-2 EINECS No.: 232-007-1
Grade: Agriculture Grade, Electron Grade Solubility In Water: 0.021 G/100 ML
High Light:

electric gas


electron gas

Product Description

Nitrogen Trifluoride NF3 , 99.99~99.999% , Used In semiconductor




The nitrogen trifluoride is a colorless, odorless, nonflammable gas. Elemental fluorine has been introduced as an environmentally friendly replacement for nitrogen trifluoride in the manufacture of flat-panel displays and thin-film solar cells.


Nitrogen trifluoride is also used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers. It is preferred to fluorine gas due to its convenient handling properties, reflecting its considerable stability.

It is compatible with steel and Monel, as well as several plastics.




1. Physical properties


Product Name Nitrogen Trifluoride
Molecular Formula NF3
UN No. UN 2451
CAS No. 7783-54-2
EINECS No. 232-007-1


Nitrogen Trifluoride NF3odorless Tasteless Colorless Gas For Semiconductor , DOT Listed 0

2. Typical technical data


Item Unit Index
NF3 Vol.% ≥ 99.995 99.99
CF4 Vol.% ≤ ≤20 ≤40
N2 Vol.% ≤ ≤5 ≤10
O2+Ar Vol.% ≤ ≤3 ≤5
CO Vol.% ≤ ≤1 ≤5
CO2 Vol.% ≤ ≤1 ≤5
N2O Vol.% ≤ ≤1 ≤5
SF6 Vol.% ≤ ≤2 ≤5
H2O Vol.% ≤ ≤3 ≤1



3. Package


DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder


Cylinders Information Individual Cylinder(47L) Bundle Y Cylinder ISO Tube
Material Mn Steel(316L)   Cr-Mo Steel  
Valve Connection Type CGA 330 CGS/DISS 640   DISS 640 etc  
Type DOT-3AA GB5099 47L*16/47L*25   20ft:40ft
Pressure 9-13Mpa      
Filling Weight 20/22.7kg   195/200  




Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.

Contact Details
Vicky Liu

Phone Number : 86-27-82653381

WhatsApp : +8613667126861