Semiconductor Manufacturing Purity Electronic Gases 99.9% Halocarbon 116

Basic Information
Place of Origin: China
Brand Name: Newradar Gas
Certification: ISO/DOT/GB
Model Number: N/A
Minimum Order Quantity: 1000 kilogram
Price: negotiation
Packaging Details: standard export packing:each cylinder to be protected by two poly-nets,standing on wooden pallet wrapped by plastic film
Delivery Time: 15-25 working days after received your payment
Payment Terms: L/C, , T/T, Western Union, MoneyGram
Supply Ability: 3,00 ton per month
Detail Information
RTECS: KI4110000 Hazard Note .:: Irritant
Purity:: 99.9%~99.999% Other Names: Carbon Hexafluoride, 1,1,1,2,2,2-Hexafluoroethane, Perfluoroethane, Ethforane, Halocarbon 116, PFC-116, CFC-116, R-116, Arcton 116, Halon 2600
Appearance:: Colorless Liquefied Gas UN NO.: 2193
Grade Standard: Electron Grade Industrial Grade Synonyms: 1,1,1,2,2,2-Hexafluoroethane;C2F6;ethane,hexafluoro-;Ethylhexafluoride;f116;F-116;FC1160;Fluorocarbon 116
Application: Electronics Equipment,transformer,refrigerating Fluid MF:: C2F6
MW:: 138.01
High Light:

electric gas


purity plus specialty gases

Product Description

Purity 99.9% Halocarbon 116 Used As A Versatile Etchant In Semiconductor Manufacturing



First, the leakage C2F6 gases emergency treatment: wear self-contained breathing apparatus, wearing uniforms. Cut off the gas source. (Indoor) or strong ventilation (outdoor). The leaky container can no longer be used and is subject to technical removal to remove any remaining gas.
Second, the protective measures:
Respiratory protection: When the air concentration is high, you should wear gas masks. In case of emergency rescue or evacuation, it is advisable to wear self-contained breathing apparatus.
Eye protection: generally do not need special protection.
Body protection: wear overalls.
Hand protection: generally do not need special protection.
Other: Avoid high concentrations of inhalation.
Third, first aid measures
Inhalation: from the scene to the fresh air. Breathing difficulties to oxygen. When breathing stops, take artificial respiration immediately. Medical treatment.
Fire fighting method: cut off the gas source. Spray the water to cool the container, if possible, move the container from the fire to the open





1. Physical properties




Molecular Formula




UN No.



Hazardous Class




Cylinder Capacity

 40L, 500L

Filling Weight

 530kg/500L refillable cylinder

 20kg/40L refillable cylinder

Storage and Transportation

 Use, store and transport below 45C. Store in cool and well-ventilated areas. Keep away from fire, heat, sunlight and flammable substances. Handle carefully when loading and unloading to avoid damages to gas cylinders and accessories.


2. Typical technical data


Purity, % ≥99.8
Moisture, PPm ≤10
Acidity, PPm ≤1
Vapor Residue, PPm ≤100
Appearance Colorless, No turbid
Odor No Strange Stench









Molecular Weight 66.1
Boiling Point, °C -24.7
Critical Temperature, °C 113.5
Critical Pressure, Mpa 4.58
Specific Heat of Liquid, 30°C, [KJ/(kg°C)] 1.68
GWP 0.014












Multi - Functional Etching Technology In The Production Of Semiconductor etching of metal
The Metal Substrate

It can be used in the selective etching of metal silicon metal and metal oxide.

Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket.



Contact Details
Vicky Liu

Phone Number : 86-27-82653381

WhatsApp : +8613667126861