Place of Origin: | China |
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Brand Name: | Newradar Gas |
Certification: | ISO/DOT/GB |
Model Number: | N/A |
Minimum Order Quantity: | 1 cylinders |
Price: | negotiation |
Packaging Details: | Packed in10L-50L cylinder or customised cylinder by customer |
Delivery Time: | 30 working days after received your payment |
Payment Terms: | T/T or L/C |
Supply Ability: | 500 Cylinders Per Month |
Product Name: | Germane | Appearance: | Colorless Gas |
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Molar Mass: | 117.17 G/mol | Molecular Shape: | Tetrahedral |
Density: | 3.3 Kg/m3 | EINECS No.: | 231-961-6 |
Vapor Pressure: | >1 Atm | Other Names: | Germanomethane |
Highlight: | electric gas,purity plus specialty gases |
10% Germane And Hydrogen Gas Mixtures In 49L Cylinders Use In Semiconductor Industry
Description:
The gas decomposes near 600K to germanium and hydrogen. Because of its thermal lability, germane is used in the semiconductor industry for the epitaxial growth of germanium by MOVPE or chemical beam epitaxy. Organogermanium precursors (e.g. isobutylgermane, alkylgermanium trichlorides, and imethylaminogermanium trichloride) have been examined as less hazardous liquid alternatives to germane for deposition of Ge-containing films by MOVPE.
Specifications:
1. Physical properties
Product Name | Germane |
Molecular Formula | GeH4 |
UN No. | UN 2192 |
CAS No. | 7782-65-2 |
EINECS No. | 231-961-6 |
2. Typical technical data (COA)
Component | Specification |
GERMANE | ≥99.999% |
Carbon Dioxide | <2 |
Carbon Monoxide | <1 |
Digermane | <20 |
Nitrogen | <2 |
Hydrogen | <50 |
Oxygen+ Argon | <0.5 |
THC (as Methane) | <1 |
Trigername | <2 |
3. Packing details:
Cylinder Size
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Cylinder Dimension
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Connection
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Content
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49L
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23cm*1420cm approx.
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CGA632
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Net: 1.5kg
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4. Applications:
Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.