CAS No.:: | Depend On Compenonet | Other Names:: | Argon Fluoride Mixtures |
---|---|---|---|
Purity:: | 99.9%-99.999% | Appearance:: | Colorless |
Application:: | Industrial | Name: | Ultra High Purity Gas |
High Light: | laser gas mixtures,msds natural gas |
Ophthalmic Excimer Gas
The premixed gas that acts on the excimer laser equipment is mainly fluorine gas and argon gas. With helium as the balance gas, Newradar Gas has always maintained close contact with laser cavity equipment manufacturers and provided assistance in gas research and development. At present, we can provide ArF premixed gas for excimer laser equipment of almost all brands on the market.
Chemical | Chemical | Chemical | CAS # | EINECS | % | OSHA PEL | ACGIH TLV | NIOSH REL | ||
Name | Synonym | Formula | # | Composition | ||||||
in Mixture | ||||||||||
Fluorine | NA | F2 | 7782-41-4 | 231-954-8 | < 1% | TWA = 0.1ppm | TWA = 1ppm | TWA = 0.1 ppm | ||
STEL = 2 ppm | IDLH = 25 ppm | |||||||||
Krypton* | NA | Kr | 7439-90-9 | 231-098-5 | 0-20% | NA | NA | NA | ||
Xenon* | NA | Xe | 7440-63-3 | 231-172-7 | 0-20% | NA | NA | NA | ||
Argon* | NA | Ar | 7440-37-1 | 231-147-0 | 0-99% | NA | NA | NA | ||
Helium* | NA | He | 7440-59-7 | 231-168-5 | 0-99% | NA | NA | NA | ||
Neon* | NA | Ne | 7440-01-9 | 231-110-9 | 0-99% | NA | NA | NA |
Fluorine | |
Molecular Weight | 38.00 |
Gas Density @ 21.1°C (70°F) | 0.098 lb/ft3 (1.57 kg/m3) |
Boiling Point @ 1 atm | -188.2oC (-306.8oF) |
Freezing/Metling Point @ 1 atm | -219.7oC (-363.4oF) |
Specific Gravity (air = 1) @ 21.1°C | 1.312 |
(70°F) | |
Solubility in Water vol/vol at 0°C (32°F) | |
and 1 atm | |
Specific Volume @ 21.1°C (70°F | 10.17 ft3/lb (0.635 m3/kg) |
Critical Pressure | 756.4 psia (5215 kPa abs) |
Odor Threshold | 0.097-0.19 ppm |
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