Place of Origin: | China |
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Brand Name: | Newradar Gas |
Certification: | ISO/DOT/GB |
Model Number: | N/A |
Minimum Order Quantity: | 1 pcs |
Price: | negotiation |
Packaging Details: | Packed in 10L-500L cylinder or packed according to the demands. |
Delivery Time: | 10-20 working days after received your payment |
Payment Terms: | L/C, , T/T, Western Union, MoneyGram |
Supply Ability: | 1000 pcs per month |
Product Name: | Nitrogen Trifluoride | Purity: | 99.99% To 99.999% |
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Molar Mass: | 71.00 G/mol | Appearance: | Colourless Gas |
CAS No.: | 7783-54-2 | EINECS No.: | 232-007-1 |
Melting Point: | −207.15 °C | Boiling Point: | −129.06 °C |
High Light: | electric gas,electron gas |
NF3 , Liquid Gas , Nitrogen Trifluoride , 99.99~99.999% , Packaged In 10L To 500L Cylinders
Description:
Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics.
Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics.
Nitrogen trifluoride is used in the plasma etching of silicon wafers. Today nitrogen trifluoride is predominantly employed in the cleaning of the PECVD chambers in the high-volume production of liquid-crystal displays and silicon-based thin-film solar cells. In these applications NF3 is initially broken down in situ by a plasma.
Specifications:
1. Physical properties
Product Name | Nitrogen Trifluoride |
Molecular Formula | NF3 |
UN No. | UN 2451 |
CAS No. | 7783-54-2 |
EINECS No. | 232-007-1 |
2. Typical technical data
Item | Unit | Index | |
NF3 | Vol.% ≥ | 99.995 | 99.99 |
CF4 | Vol.% ≤ | ≤20 | ≤40 |
N2 | Vol.% ≤ | ≤5 | ≤10 |
O2+Ar | Vol.% ≤ | ≤3 | ≤5 |
CO | Vol.% ≤ | ≤1 | ≤5 |
CO2 | Vol.% ≤ | ≤1 | ≤5 |
N2O | Vol.% ≤ | ≤1 | ≤5 |
SF6 | Vol.% ≤ | ≤2 | ≤5 |
H2O | Vol.% ≤ | ≤3 | ≤1 |
3. Package
DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder
Applications:
Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.