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NF3 Liquid Electronic Gases Packaged With 10L To 500L Cylinders , 71.00 G/Mol Molar Mass

Basic Information
Place of Origin: China
Brand Name: Newradar
Certification: ISO/DOT/GB
Model Number: N/A
Minimum Order Quantity: 1 pcs
Price: negotiation
Packaging Details: Packed in 10L-500L cylinder or packed according to the demands.
Delivery Time: 10-20 working days after received your payment
Payment Terms: L/C, , T/T, Western Union, MoneyGram
Supply Ability: 1000 pcs per month
Detail Information
Product Name: Nitrogen Trifluoride Purity: 99.99% To 99.999%
Molar Mass: 71.00 G/mol Appearance: Colourless Gas
CAS No.: 7783-54-2 EINECS No.: 232-007-1
Melting Point: −207.15 °C Boiling Point: −129.06 °C
High Light:

electric gas

,

electron gas


Product Description

NF3 , Liquid Gas , Nitrogen Trifluoride , 99.99~99.999% , Packaged In 10L To 500L Cylinders

 

Description:

 

Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics.

Nitrogen trifluoride is the inorganic compound with the formula NF3. This nitrogen-fluorine compound is a colorless, odorless, nonflammable gas. It finds increasing use as an etchant in microelectronics.

 

Nitrogen trifluoride is used in the plasma etching of silicon wafers. Today nitrogen trifluoride is predominantly employed in the cleaning of the PECVD chambers in the high-volume production of liquid-crystal displays and silicon-based thin-film solar cells. In these applications NF3 is initially broken down in situ by a plasma.

 

Specifications:

 

1. Physical properties

 

Product Name Nitrogen Trifluoride
Molecular Formula NF3
UN No. UN 2451
CAS No. 7783-54-2
EINECS No. 232-007-1

 

2. Typical technical data

 

Item Unit Index
NF3 Vol.% ≥ 99.995 99.99
CF4 Vol.% ≤ ≤20 ≤40
N2 Vol.% ≤ ≤5 ≤10
O2+Ar Vol.% ≤ ≤3 ≤5
CO Vol.% ≤ ≤1 ≤5
CO2 Vol.% ≤ ≤1 ≤5
N2O Vol.% ≤ ≤1 ≤5
SF6 Vol.% ≤ ≤2 ≤5
H2O Vol.% ≤ ≤3 ≤1

 

 

3. Package

 

DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder

 

Applications:

 

Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.

Contact Details
Vicky Liu

Phone Number : 86-27-82653381

WhatsApp : +8613667126861