|Place of Origin:||China|
|Brand Name:||Newradar Gas|
|Minimum Order Quantity:||1 pcs|
|Packaging Details:||Packed in 10L-500L cylinder or packed according to the demands.|
|Delivery Time:||10-20 working days after received your payment|
|Payment Terms:||L/C, , T/T, Western Union, MoneyGram|
|Supply Ability:||1000 pcs per month|
|Product Name:||Nitrogen Trifluoride||Density:||3.003 Kg/m3 (1 Atm, 15 °C)|
|CAS No.:||7783-54-2||EINECS No.:||232-007-1|
|Melting Point:||−207.15 °C||Boiling Point:||−129.06 °C|
purity plus specialty gases
NF3, Liquid Gas , Nitrogen Trifluoride , 99.99~99.999% , Used In Electronic Industry
Nitrogen Trifluoride (NF3) is a colorless and stable gas under ambient conditions. The gas is incombustible but can support combustion. When the temperature is above 350℃, the gas will decompose slowly to produce fluorine of strong oxidation and therefore, it is a strong oxidant at high temperature.
The resulting fluorine atoms are the active cleaning agents that attack the polysilicon, silicon nitride and silicon oxide. Nitrogen trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD.
NF3 has been considered as an environmentally preferable substitute for sulfur hexafluoride or perfluorocarbons such as hexafluoroethane. The process utilization of the chemicals applied in plasma processes is typically below 20%. Therefore some of the PFCs and also some of the NF3 always escape into the atmosphere. Modern gas abatement systems can decrease such emissions.
1. Physical properties
|Product Name||Nitrogen Trifluoride|
|UN No.||UN 2451|
2. Typical technical data
DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder
|Cylinders Information||Individual Cylinder(47L)||Bundle||Y Cylinder||ISO Tube|
|Material||Mn Steel(316L)||Cr-Mo Steel|
|Valve Connection Type||CGA 330 CGS/DISS 640||DISS 640 etc|
Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.