NF3 99.99~99.999% Purity Colourless Electronic Gases With Moldy Odor , −129.06 °C Boiling Point

NF3, Liquid Gas , Nitrogen Trifluoride , 99.99~99.999% , Used In Electronic Industry

Description:

Nitrogen Trifluoride (NF3) is a colorless and stable gas under ambient conditions. The gas is incombustible but can support combustion. When the temperature is above 350℃, the gas will decompose slowly to produce fluorine of strong oxidation and therefore, it is a strong oxidant at high temperature.

The resulting fluorine atoms are the active cleaning agents that attack the polysilicon, silicon nitride and silicon oxide. Nitrogen trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD.

NF3 has been considered as an environmentally preferable substitute for sulfur hexafluoride or perfluorocarbons such as hexafluoroethane. The process utilization of the chemicals applied in plasma processes is typically below 20%. Therefore some of the PFCs and also some of the NF3 always escape into the atmosphere. Modern gas abatement systems can decrease such emissions.

Specifications:

1. Physical properties

2. Typical technical data

3. Package

DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder

Applications:

Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.