NF3 99.99~99.999% Purity Colourless Electronic Gases With Moldy Odor , −129.06 °C Boiling Point

Basic Information
Place of Origin: China
Brand Name: Newradar Gas
Certification: ISO/DOT/GB
Model Number: N/A
Minimum Order Quantity: 1 pcs
Price: negotiation
Packaging Details: Packed in 10L-500L cylinder or packed according to the demands.
Delivery Time: 10-20 working days after received your payment
Payment Terms: L/C, , T/T, Western Union, MoneyGram
Supply Ability: 1000 pcs per month
Detail Information
Product Name: Nitrogen Trifluoride Density: 3.003 Kg/m3 (1 Atm, 15 °C)
Odor: Moldy Appearance: Colourless Gas
CAS No.: 7783-54-2 EINECS No.: 232-007-1
Melting Point: −207.15 °C Boiling Point: −129.06 °C
High Light:

electric gas


purity plus specialty gases

Product Description

NF3, Liquid Gas , Nitrogen Trifluoride , 99.99~99.999% , Used In Electronic Industry




Nitrogen Trifluoride (NF3) is a colorless and stable gas under ambient conditions. The gas is incombustible but can support combustion. When the temperature is above 350℃, the gas will decompose slowly to produce fluorine of strong oxidation and therefore, it is a strong oxidant at high temperature.


The resulting fluorine atoms are the active cleaning agents that attack the polysilicon, silicon nitride and silicon oxide. Nitrogen trifluoride can be used as well with tungsten silicide, and tungsten produced by CVD.


NF3 has been considered as an environmentally preferable substitute for sulfur hexafluoride or perfluorocarbons such as hexafluoroethane. The process utilization of the chemicals applied in plasma processes is typically below 20%. Therefore some of the PFCs and also some of the NF3 always escape into the atmosphere. Modern gas abatement systems can decrease such emissions.




1. Physical properties


Product Name Nitrogen Trifluoride
Molecular Formula NF3
UN No. UN 2451
CAS No. 7783-54-2
EINECS No. 232-007-1


2. Typical technical data


Item Unit Index
NF3 Vol.% ≥ 99.995 99.99
CF4 Vol.% ≤ ≤20 ≤40
N2 Vol.% ≤ ≤5 ≤10
O2+Ar Vol.% ≤ ≤3 ≤5
CO Vol.% ≤ ≤1 ≤5
CO2 Vol.% ≤ ≤1 ≤5
N2O Vol.% ≤ ≤1 ≤5
SF6 Vol.% ≤ ≤2 ≤5
H2O Vol.% ≤ ≤3 ≤1



3. Package


DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder


Cylinders Information Individual Cylinder(47L) Bundle Y Cylinder ISO Tube
Material Mn Steel(316L)   Cr-Mo Steel  
Valve Connection Type CGA 330 CGS/DISS 640   DISS 640 etc  
Type DOT-3AA GB5099 47L*16/47L*25   20ft:40ft
Pressure 9-13Mpa      
Filling Weight 20/22.7kg   195/200  




Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.

Contact Details

Phone Number : 0086-27-87819318