Moldy Odor Ultra High Purity Gases For Electronic Industry , −207.15 °C Melting Point

Basic Information
Place of Origin: China
Brand Name: Newradar Gas
Certification: ISO/DOT/GB
Model Number: N/A
Minimum Order Quantity: 1 pcs
Price: negotiation
Packaging Details: Packed in 10L-500L cylinder or packed according to the demands.
Delivery Time: 10-20 working days after received your payment
Payment Terms: L/C, , T/T, Western Union, MoneyGram
Supply Ability: 1000 pcs per month
Detail Information
Product Name: Nitrogen Trifluoride Density: 3.003 Kg/m3 (1 Atm, 15 °C)
Odor: Moldy Appearance:: Colourless Gas
Application: Plasma Etching Of Silicon Wafers EINECS No.: 232-007-1
Melting Point: −207.15 °C Boiling Point: −129.06 °C
High Light:

electron gas


purity plus specialty gases

Product Description

Nitrogen Trifluoride NF3 , 99.99~99.999% , Used In Plasma Etching Of Silicon Wafers




Nitrogen trifluoride(NF3) is a new special gas for electronic industry as cleaning gas for plasma cleaning and etching,widely used in TFT-LCD, semiconductor and solar photoelectricity industry etc.,having advantages of no remaing, high cleaning speed and easy to decompose.


Based on the maturely electrolysis and fluorides production technology, through continuous R&D for several year, the company has achieved several produion technology advanced in the world. Since 2009 LRICI has been stable a supplier with high reputation of electronic-grade products NF3 gas to the domestic customers and customers from Japan, Taiwan, South Korea Etc. The company now has capacity of 1000 t/a and can prod uce even more than 99.999% spec, NF3 production continuously and stably.




1. Physical properties


Product Name Nitrogen Trifluoride
Molecular Formula NF3
UN No. UN 2451
CAS No. 7783-54-2
EINECS No. 232-007-1


2. Typical technical data


Impurities NF3≥99.995% Vol.% NF3≥99.99% Vol.% NF3≥99.98% Vol.% NF3≥99.9% Vol.%
CF4 ≤20 Vol.ppm ≤40 Vol.ppm ≤100 Vol.ppm ≤500 Vol.ppm
N2 ≤5 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤50 Vol.ppm
O2+Ar ≤3 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤50 Vol.ppm
CO2 ≤1 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤10 Vol.ppm
H2O ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm
HF ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm ≤1 Vol.ppm
SF6 ≤1 Vol.ppm ≤2 Vol.ppm ≤2 Vol.ppm ≤25 Vol.ppm
N2O ≤1 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤10 Vol.ppm
CO ≤0.5 Vol.ppm ≤5 Vol.ppm ≤10 Vol.ppm ≤10 Vol.ppm



3. Package


DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder


Cylinders Information Individual Cylinder(47L) Bundle Y Cylinder ISO Tube
Material Mn Steel(316L)   Cr-Mo Steel  
Valve Connection Type CGA 330 CGS/DISS 640   DISS 640 etc  
Type DOT-3AA GB5099 47L*16/47L*25   20ft:40ft
Pressure 9-13Mpa      
Filling Weight 20/22.7kg   195/200  




Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.

Contact Details

Phone Number : 0086-27-87819318