Moldy Odor Ultra High Purity Gases For Electronic Industry , −207.15 °C Melting Point

Nitrogen Trifluoride NF3 , 99.99~99.999% , Used In Plasma Etching Of Silicon Wafers

Description:

Nitrogen trifluoride(NF3) is a new special gas for electronic industry as cleaning gas for plasma cleaning and etching,widely used in TFT-LCD, semiconductor and solar photoelectricity industry etc.,having advantages of no remaing, high cleaning speed and easy to decompose.

Based on the maturely electrolysis and fluorides production technology, through continuous R&D for several year, the company has achieved several produion technology advanced in the world. Since 2009 LRICI has been stable a supplier with high reputation of electronic-grade products NF3 gas to the domestic customers and customers from Japan, Taiwan, South Korea Etc. The company now has capacity of 1000 t/a and can prod uce even more than 99.999% spec, NF3 production continuously and stably.

Specifications:

1. Physical properties

2. Typical technical data

3. Package

DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder

Applications:

Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.