Electric Gas C4F6 Purity 99.95% Etching Gas For Semiconductor Processing

Basic Information
Place of Origin: China
Brand Name: Newradar Gas
Certification: ISO9001
Model Number: NO
Minimum Order Quantity: 50KGS
Price: negotiation
Packaging Details: 30lb - 926L Cylinder package
Delivery Time: 10-20 DAYS
Payment Terms: Western Union, L/C, T/T
Supply Ability: 60TON
Detail Information
Brand Name:: Accept OEM, CUSTOMER BRAND Other Names:: HFB
Hazard Class: 2.3 Place Of Origin:: Wuhan
Purity:: 99.95% Application:: Semi Industry
Package:: Drum And Cylinder Cylinders Volume:: 30lb,50lb, 40L And 926L Cylinder
High Light:

electric gas


purity plus specialty gases

Product Description


C4F6 purity 99.95% Etching Gas for Semiconductor Processing





hexafluoro-1,3-butadiene (C4F6) dry etching gas it has developed in Russia. C4F6 enables dry etching at a line width of as narrow as 90 nm or less. It is therefore indispensable for processing system LSIs and high-speed, large-capacity memory devices that are increasingly used in digital electric appliances and liquid crystal displays.

Fluorocarbon gases are widely used for processing silicon oxide film. Compared with octafluorocyclobutane (C4F8) currently used for processing at the line width of 130 nm, C4F6 has the following advantages:

Electric Gas C4F6 Purity 99.95% Etching Gas For Semiconductor Processing 0


Container Size 44L Steel 8L Steel
Fill Weights(kgs) 45 5
Valve ConnecƟon PneumaƟc DISS 724 Manual DISS 724
Cylinder Dimensions(in) 9x51 7x19





1. It can use in fluorine-based etching.

2. It also can use in cleaning gases,

3. C4F6 can use as organometallic film forming gases,

Contact Details

Phone Number : 0086-27-87819318