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High Purity Gas C4F6 99.995% Fluorocarbon-Based Plasma Etching Colourless Gas

Basic Information
Place of Origin: China
Brand Name: Newradar Gas
Certification: ISO9001
Model Number: NO
Minimum Order Quantity: 40KGS
Price: negotiation
Packaging Details: 30lb - 926L Cylinder package
Delivery Time: 7-10 DAYS
Supply Ability: 50TON
Detail Information
CAS No.:: 685-63-2 Other Names:: 1,1,2,3,4,4-hexafluorbuta-1,3-dieen
Hazard Class : 2.3 Place Of Origin:: Hubei
Purity:: 99.95% Application:: Fluorocarbon-based Plasma Etching 
Package:: Customer Cylinder Fill Cylinders Volume:: 50L
High Light:

electric gas

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purity plus specialty gases


Product Description

High purity C4F6 gas99.995%, Use in Fluorocarbon-based Plasma Etching

 

Description:

 

HFB, C4F6 dry etching gas it has developed in Russia. C4F6 enables dry etching at a line width of as narrow as 90 nm or less. It is therefore indispensable for processing system LSIs and high-speed, large-capacity memory devices that are increasingly used in digital electric appliances and liquid crystal displays.

Fluorocarbon gases are widely used for processing silicon oxide film. Compared with octafluorocyclobutane (C4F8) currently used for processing at the line width of 130 nm, C4F6 has the following advantages:

 

1.High aspect ratio, resulting in narrow and deep grooves (suitable for processing at very narrow line width)

2.High selectivity (ensures etching of silicon oxide film only; does not affect photoresist, silicon substrate or nitride film)

 

FIRE FIGHTING MEASURES

FLASH POINT NO DATA AVAILABLE.
EXTINGUISHING MEDIA SUITABLE: WATER SPRAY, DRY FOAM, CARBON DIOXIDE.
FIREFIGHTING PROTECTIVE EQUIPMENT: WEAR SELF-CONTAINED BREATHING APPARATUS AND PROTECTIVE CLOTHING TO PREVENT CONTACT WITH SKIN AND EYES. SPECIFIC HAZARD(S): EMITS TOXIC FUMES UNDER FIRE CONDITIONS. CYLINDERS MAY RUPTURE UNDER FIRE CONDITIONS. COOL ALL AFFECTED CONTAINERS WITH FLOODING QUANTITIES OF WATER.

 

 

FIRST-AID MEASURES

INHALATION EXPOSURE IF INHALED, REMOVE EXPOSED TO FRESH AIR. IF BREATHING IS DIFFICULT, CALL A PHYSICIAN IMMEDIATELY.
DERMAL EXPOSURE IN CASE OF EXPOSURE, IMMEDIATELY WASH SKIN WITH SOAP AND COPIOUS AMOUNTS OF WATER. CALL A PHYSICIAN IMMEDIATELY.
EYE EXPOSURE IN CASE OF CONTACT WITH EYES, FLUSH WITH COPIOUS AMOUNTS OF WATER FOR AT LEAST 15 MINUTES. ASSURE ADEQUATE FLUSHING BY SEPARATING THE EYELIDS WITH FINGERS. CALL A PHYSICIAN IMMEDIATELY.
ORAL EXPOSURE NOT A NORMAL ROUTE OF ENTRY. IF SWALLOWED, WASH OUT MOUTH WITH WATER PROVIDED PERSON IS CONSCIOUS. CALL A PHYSICIAN.

 

 

High Purity Gas C4F6 99.995% Fluorocarbon-Based Plasma Etching Colourless Gas 0

 

Applications:

1.C4F6 can use as organometallic film forming gases,

2. HFB (C4F6) gas can use as cleaning agents, waste-gas processing scrubbers

Contact Details
Vicky Liu

Phone Number : 86-27-82653381

WhatsApp : +8613667126861