CAS No.:: | 685-63-2 | Other Names:: | 1,1,2,3,4,4-hexafluorbuta-1,3-dieen |
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Hazard Class: | 2.3 | Place Of Origin:: | Hubei |
Purity:: | 99.95% | Application:: | Fluorocarbon-based Plasma Etching |
Package:: | Customer Cylinder Fill | Cylinders Volume:: | 50L |
High Light: | electric gas,purity plus specialty gases |
High purity C4F6 gas99.995%, Use in Fluorocarbon-based Plasma Etching
Description:
HFB, C4F6 dry etching gas it has developed in Russia. C4F6 enables dry etching at a line width of as narrow as 90 nm or less. It is therefore indispensable for processing system LSIs and high-speed, large-capacity memory devices that are increasingly used in digital electric appliances and liquid crystal displays.
Fluorocarbon gases are widely used for processing silicon oxide film. Compared with octafluorocyclobutane (C4F8) currently used for processing at the line width of 130 nm, C4F6 has the following advantages:
1.High aspect ratio, resulting in narrow and deep grooves (suitable for processing at very narrow line width)
2.High selectivity (ensures etching of silicon oxide film only; does not affect photoresist, silicon substrate or nitride film)
FIRE FIGHTING MEASURES
FLASH POINT | NO DATA AVAILABLE. |
EXTINGUISHING MEDIA | SUITABLE: WATER SPRAY, DRY FOAM, CARBON DIOXIDE. |
FIREFIGHTING | PROTECTIVE EQUIPMENT: WEAR SELF-CONTAINED BREATHING APPARATUS AND PROTECTIVE CLOTHING TO PREVENT CONTACT WITH SKIN AND EYES. SPECIFIC HAZARD(S): EMITS TOXIC FUMES UNDER FIRE CONDITIONS. CYLINDERS MAY RUPTURE UNDER FIRE CONDITIONS. COOL ALL AFFECTED CONTAINERS WITH FLOODING QUANTITIES OF WATER. |
FIRST-AID MEASURES
INHALATION EXPOSURE | IF INHALED, REMOVE EXPOSED TO FRESH AIR. IF BREATHING IS DIFFICULT, CALL A PHYSICIAN IMMEDIATELY. |
DERMAL EXPOSURE | IN CASE OF EXPOSURE, IMMEDIATELY WASH SKIN WITH SOAP AND COPIOUS AMOUNTS OF WATER. CALL A PHYSICIAN IMMEDIATELY. |
EYE EXPOSURE | IN CASE OF CONTACT WITH EYES, FLUSH WITH COPIOUS AMOUNTS OF WATER FOR AT LEAST 15 MINUTES. ASSURE ADEQUATE FLUSHING BY SEPARATING THE EYELIDS WITH FINGERS. CALL A PHYSICIAN IMMEDIATELY. |
ORAL EXPOSURE | NOT A NORMAL ROUTE OF ENTRY. IF SWALLOWED, WASH OUT MOUTH WITH WATER PROVIDED PERSON IS CONSCIOUS. CALL A PHYSICIAN. |
Applications:
1.C4F6 can use as organometallic film forming gases,
2. HFB (C4F6) gas can use as cleaning agents, waste-gas processing scrubbers