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Hexafluorobutadiene C4F6 Electronic Gases Chemistry For Critical Dielectric Etch

Basic Information
Place of Origin: zhejiang
Brand Name: OEM
Certification: ISO9001
Model Number: N/M
Minimum Order Quantity: 35KGS
Price: negotiation
Packaging Details: 30lb - 926L Cylinder package
Delivery Time: 7-10 DAYS
Supply Ability: 50TON
Detail Information
Beschrijving: Toxisch, Ontvlambaar Gas Other Names:: Hexafluoro-1,3-butadiene
Refill:: Ok Cylinders Certificate:: GB, ISO, CE, DOT
Supply Ability:: 30 Ton Per Month Application:: Industry
Package:: 30-1000kg/per Cylinder Cylinders Volume:: 30LB,50LB Disposable Cylinder
High Light:

electric gas

,

purity plus specialty gases


Product Description

Hexafluorobutadiene C4F6 gas chemistry for critical dielectric etch applications.

 

Description:

 

C4F6 is an unsaturated fluorocarbon with an alternating double bond. It is a colorless, odorless, toxic, flammable gas showing very high performance for plasma, ion beam, or sputter etching in semiconductor devices manufacturing with Xenon (Xe) and Argon (Ar) as carrier or dilution gas. Due to the short atmospheric lifetime (< 1day), the negligible global warming potential, and the inertness to the stratospheric ozone layer, it is an environmentally compatible gas.Hexafluorobutadiene C4F6 Electronic Gases Chemistry For Critical Dielectric Etch 0

 

Hexafluoro1,3‐butadine is a toxic, colorless, odorless, flammable liquefied compressed gas.

 

C4F6 gas as an etchant gas for a high aspect ratio contact hole etching can be a good

alternative to PFC gases.

 

STABILITY AND REACTIVITY

STABILITY STABLE: STABLE UNDER RECOMMENDED STORAGE CONDITIONS. MATERIALS TO AVOID: STRONG OXIDIZING AGENTS. CONDITIONS TO AVOID: DO NOT PIERCE OR BURN, EVEN AFTER USE. DO NOT SPRAY ON A NAKED FLAME OR ANY INCANDESCENT MATERIAL. HEAT, FLAMES AND SPARKS.
HAZARDOUS DECOMPOSITION PRODUCTS HAZARDOUS DECOMPOSITION PRODUCTS: CARBON OXIDES, HYDROGEN FLUORIDE.
HAZARDOUS POLYMERIZATION HAZARDOUS POLYMERIZATION: WILL NOT OCCUR.

 

Applications:

 

1. HFB (C4F6) gas can use as cleaning agents, waste-gas processing scrubbers

2. Hexafluoro-2-butyne gas components for optical fiber communications equipment.

3. It is therefore indispensable for processing system LSIs and high-speed, large-capacity memory devices that are increasingly used in digital electric appliances and liquid crystal displays.

Contact Details
Vicky Liu

Phone Number : 86-27-82653381

WhatsApp : +8613667126861