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Colorless C4F6 Electronic Gases 44L 99.95% Purity Cylinder Gas Hexafluoro-1,3-Butadiene

Basic Information
Place of Origin: shandong
Brand Name: OEM
Certification: ISO9001
Model Number: N/M
Minimum Order Quantity: 60 KGS
Price: negotiation
Packaging Details: 30lb - 926L Cylinder package
Delivery Time: 7-10 DAYS
Payment Terms: Western Union, L/C, T/T
Supply Ability: 50TON
Detail Information
Appearance:: Gas Color: Colorless
Odor:: Odorless Molecular Weight:: 162.03 G/mol
Melting Point / Freezing Point:: -130 C Boiling Point / Boiling Range:: -5.5 C
Flash Point:: ./. Chemical Name:: Hexafluoro-1,3-butadiene
High Light:

electric gas

,

purity plus specialty gases


Product Description

C4F6 Etching Gas for Semiconductor Processing

 

Description:

 

C4F6 (Hexafluoro-1,3-butadiene) is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.

 

Package:44~49L cylinder, CGA350 SS valve

Filling content: 20kg/cyl

 

C4F6, is an environmentally friendly, high-performance semiconductor fabrication specialty gas that
provides high etch rates, good aspect ratio control and high selectivity to
photoresist in critical dielectric etch applications.

 

C4F6 gas improves dielectric etch process results in many key processing areas, including copper dual damascene applications and low K dielectric materials for 0.13 micron and beyond chip designs. Sifren 46 also provides environmental advantages in low global warming emissions and zero
ozone depletion potential.

Colorless C4F6 Electronic Gases 44L 99.95% Purity Cylinder Gas Hexafluoro-1,3-Butadiene 0

PHYSICAL AND CHEMICAL PROPERTIES

APPEARANCE AND ODOR GAS @ 25 °C AND 760 mmHg.
MELTING POINT: -132.1 °C
BOILING POINT 6 -7 °C @ 760 mmHg
VAPOR PRESSURE: 25 psia @ 20 °C
DENSITY: 1.553 g/mL @ -20 °C
REFRACTIVE INDEX: 1.378 @ -20 °C

 

STANDARD PACKAGE INFORMATION—ASIA AND NORTH AMERICA

Container Size 44L Steel 8L Steel
Fill Weights(kgs) 45 5
Valve ConnecƟon PneumaƟc DISS 724 Manual DISS 724
Cylinder Dimensions(in) 9x51 7x19

 

Applications:

1. Plasma Etching Processes for Sub-quarter Micron Devices.

2. Perfluorocarbon Alternative Gas Plasmas

3. Used in TFT-LCDs and photovoltaics.

Contact Details
Vicky Liu

Phone Number : 86-27-82653381

WhatsApp : +8613667126861