Colorless C4F6 Electronic Gases 44L 99.95% Purity Cylinder Gas Hexafluoro-1,3-Butadiene

C4F6 Etching Gas for Semiconductor Processing

Description:

C4F6 (Hexafluoro-1,3-butadiene) is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.

Package:44~49L cylinder, CGA350 SS valve

Filling content: 20kg/cyl

C4F6, is an environmentally friendly, high-performance semiconductor fabrication specialty gas that
provides high etch rates, good aspect ratio control and high selectivity to
photoresist in critical dielectric etch applications.

C4F6 gas improves dielectric etch process results in many key processing areas, including copper dual damascene applications and low K dielectric materials for 0.13 micron and beyond chip designs. Sifren 46 also provides environmental advantages in low global warming emissions and zero
ozone depletion potential.

PHYSICAL AND CHEMICAL PROPERTIES

STANDARD PACKAGE INFORMATION—ASIA AND NORTH AMERICA

Applications:

1. Plasma Etching Processes for Sub-quarter Micron Devices.

2. Perfluorocarbon Alternative Gas Plasmas

3. Used in TFT-LCDs and photovoltaics.