| Place of Origin: | China |
|---|---|
| Brand Name: | Newradar Gas |
| Certification: | ISO/DOT/GB |
| Model Number: | N/A |
| Minimum Order Quantity: | 1000 kilogram |
| Price: | negotiation |
| Packaging Details: | standard export packing:each cylinder to be protected by two poly-nets,standing on wooden pallet wrapped by plastic film |
| Delivery Time: | 15-25 working days after received your payment |
| Payment Terms: | L/C, , T/T, Western Union, MoneyGram |
| Supply Ability: | 3,00 ton per month |
| TSCA: | T | Chemical Properties: | Colourless Gas |
|---|---|---|---|
| Purity:: | 99.9% | Other Names: | Carbon Hexafluoride, 1,1,1,2,2,2-Hexafluoroethane, Perfluoroethane, Ethforane, Halocarbon 116, PFC-116, CFC-116, R-116, Arcton 116, Halon 2600 |
| Appearance:: | Colorless Liquefied Gas | UN NO.: | 2193 |
| Grade Standard: | Electron Grade Industrial Grade | Synonyms: | 1,1,1,2,2,2-Hexafluoroethane;C2F6;ethane,hexafluoro-;Ethylhexafluoride;f116;F-116;FC1160;Fluorocarbon 116 |
| Application: | Electronics Equipment,transformer,refrigerating Fluid | MF:: | C2F6 |
| MW:: | 138.01 | ||
| High Light: | electric gas,purity plus specialty gases |
||
Purity 99.9% Ethylhexafluoride ,Halocarbon 116 For Etching Of Silicon Dioxide Over Silicon
Description:
C2F6 Packing: 44L cylinder filling, can also be divided according to customer needs to 2-8L of the cylinder.
Uses: used as insulation gas, plasma etching agent, high dielectric strength coolant.
Physical and chemical properties: colorless, odorless, non-flammable gas, above 24.3 ℃ can not keep the liquid, molecular weight 138.0, boiling point -78 ℃, melting point -101 ℃, slightly soluble in water, stable.
Specifications:
1. Physical properties
|
Commodity |
Hexafluoroethane |
|
Molecular Formula |
R116 |
|
CAS No |
76-16-4 |
|
UN No. |
2193 |
|
Hazardous Class |
2.2 |
|
MF: |
C2F6 |
|
Cylinder Capacity |
40L, 500L |
|
Filling Weight |
530kg/500L refillable cylinder 20kg/40L refillable cylinder |
|
Storage and Transportation |
Use, store and transport below 45C. Store in cool and well-ventilated areas. Keep away from fire, heat, sunlight and flammable substances. Handle carefully when loading and unloading to avoid damages to gas cylinders and accessories. |
2. Typical technical data
| Purity, % | ≥99.8 |
| Moisture, PPm | ≤10 |
| Acidity, PPm | ≤1 |
| Vapor Residue, PPm | ≤100 |
| Appearance | Colorless, No turbid |
| Odor | No Strange Stench |
| Molecular Weight | 66.1 |
| Boiling Point, °C | -24.7 |
| Critical Temperature, °C | 113.5 |
| Critical Pressure, Mpa | 4.58 |
| Specific Heat of Liquid, 30°C, [KJ/(kg°C)] | 1.68 |
| ODP | 0 |
| GWP | 0.014 |
Applications:
| Multi - Functional Etching Technology | In The Production Of Semiconductor etching of metal |
| The Metal Substrate |
It can be used in the selective etching of metal silicon metal and metal oxide. Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket. |
