Detail Information

Molar Mass:	138.01 G.mol−1	Flash Point.::	Non-flammable
Purity::	99.9%~99.999%	Appearance::	Colorless Liquefied Gas
UN NO.:	2193	Grade Standard:	Electron Grade Industrial Grade
Synonyms:	1,1,1,2,2,2-Hexafluoroethane;C2F6;ethane,hexafluoro-;Ethylhexafluoride;f116;F-116;FC1160;Fluorocarbon 116	Application:	Electronics Equipment,transformer,refrigerating Fluid
MW::	138.01
High Light:	electric gas , purity plus specialty gases

Product Description

Purity 99.9% FC1160 Gases For Etching Of Silicon Dioxide Over Silicon

Description:

Perfluoroethane, also known as perfluoroethane, PFC-116 (R-116), chemical formula C2F6, trade name Reflube 116, relative molecular weight 138.00. At room temperature, tetrafluoromethane is colorless, odorless, non-flammable, insoluble in water compressible gas, boiling point -78.2 ℃, boiling point of the liquid density of 1608kg / m3, the critical temperature of 19.7 ℃, the critical pressure of 2.98MPa.

Specifications:

1. Physical properties

Commodity	Hexafluoroethane
Molecular Formula	R116
CAS No	76-16-4
UN No.	2193
Hazardous Class	2.2
MF:	C2F6
Cylinder Capacity	40L, 500L
Filling Weight	530kg/500L refillable cylinder 20kg/40L refillable cylinder
Storage and Transportation	Use, store and transport below 45C. Store in cool and well-ventilated areas. Keep away from fire, heat, sunlight and flammable substances. Handle carefully when loading and unloading to avoid damages to gas cylinders and accessories.

2. Typical technical data

Purity, %	≥99.8
Moisture, PPm	≤10
Acidity, PPm	≤1
Vapor Residue, PPm	≤100
Appearance	Colorless, No turbid
Odor	No Strange Stench

Molecular Weight	66.1
Boiling Point, °C	-24.7
Critical Temperature, °C	113.5
Critical Pressure, Mpa	4.58
Specific Heat of Liquid, 30°C, [KJ/(kg°C)]	1.68
ODP	0
GWP	0.014

Applications:

Multi - Functional Etching Technology

In The Production Of Semiconductor etching of metal

The Metal Substrate

It can be used in the selective etching of metal silicon metal and metal oxide.

Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket.

Tag:

Place of Origin:	China
Brand Name:	Newradar Gas
Certification:	ISO/DOT/GB
Model Number:	N/A

Minimum Order Quantity:	1000 kilogram
Price:	negotiation
Packaging Details:	standard export packing:each cylinder to be protected by two poly-nets,standing on wooden pallet wrapped by plastic film
Delivery Time:	15-25 working days after received your payment
Payment Terms:	L/C, , T/T, Western Union, MoneyGram
Supply Ability:	3,00 ton per month

High Purity 99.9% FC1160 Gases Colorless Liquefied Gas Electron Grade Industrial Grade

electric gas

purity plus specialty gases

Purity 99.9% FC1160 Gases For Etching Of Silicon Dioxide Over Silicon

nitrogen gas,

electric gas,

nitrogen gas cylinder

CAS 76-16-4 Halocarbon 116

Sulfur Hexafluoride Electronic Gases

High Purity Silane SiH4 Electronic Gases

H2S Hydrogen Sulfide Calibration Gas

Ar/F2/He/Ne excimer laser gas mixed for lens producing xecl laser excimer lasers

Isobutylene Calibration Gas 100 PPM Balance Air electron gas

Nitrogen fluoride NF3, nf3 gas

Industry Electronic Gases Sulfur Hexafluoride Gas Gaseous Dielectric Medium