Fluorine Excimer Lasers Mixture Gas Premix Gas Fluorine Krypton And Neon

Basic Information
Place of Origin: China
Brand Name: Newradar Gas
Certification: ISO/DOT/GB
Model Number: N/A
Minimum Order Quantity: 1pcs
Price: negotiation
Packaging Details: Packed in10L-50L cylinder or packed according to the demands.
Delivery Time: 20 working days after received your payment
Payment Terms: L/C, , T/T, Western Union, MoneyGram
Supply Ability: 500 pcs per month
Detail Information
Mixtures: Fluorine Excimer Lasers: Fluorine Krypton Neon Mixtures Multi-gas Lasers.: Fluoride, Krypton And Neon Gas Mixtures
Valve Type: CGA 679 Odor: Odorless
Color: Colorless Valve Outlet: DISS 718
High Light:

laser gas mixtures


msds natural gas

Product Description


Fluorine Excimer Lasers Mixture Gas Premix Gas Fluorine Krypton And Neon




Mixtures: Fluorine Excimer Lasers

Excimer lasers are multi-gas lasers. Output wavelength is a function of the rare gas/halogen combination. Excimer is the name of the rare gas / halide molecule. There are four wavelengths (spectral lines) that can be generated from fluorine mixtures.





1. Physical properties


Major Components
Fluorine 1.0% 0.9-1.0%
Krypton 1.25% 1.2-1.3%
Neon Balance  


2. Typical technical data (COA)


Maxinum Impurities
Carbon Dioxide (CO2) <5.0
Carbon Monoxide (CO) <1.0
Carbon Tetrafluoride (CF4) <2.0
Carbonyl Fluoride (COF2) <2.0
Helium (He) <8.0
Hydrogen Fluoride/Moisture (HF/H2O) <25.0
Nitrogen (N2) <25.0
Nitrogen Trifluoride (NF3) <1.0
Oxygen (O2) <25.0
Sulfur Hexafluoride (SF6) <1.0
Silicon Tetrafluoride (SiF4) <2.0
THC (as Methane) (CH4) <1.0
Xenon (Xe) <1.0


3. Package


Cylinder Specifications Contents Pressure
Cylinder Valve Outlet Options Cubic Feet Liters PSIG BAR
1 CGA679 DISS 728 265 7500 2000 139
2 CGA679 DISS 728 212 6000 2000 139
3 CGA679 DISS 728 71 2000 1800






Krypton Fluoride Mixtures are used in 248 nm lithography applications, usually in conjunction with
an inert gas mixture.


Contact Details

Phone Number : 0086-27-87819318