248 nm Lithography Excimer Laser Gases Krypton Neon Gas Mixtures

248 nm Lithography Excimer Laser Gases Krypton Neon Gas Mixtures

Description:

Krypton Neon Mixtures are used in 248 nm lithography applications, usually in conjunction with a
halogen gas mixture.

A gas laser is a laser in which an electric current is discharged through a gas to produce coherent light. The gas laser was the first continuous-light laser and the first laser to operate on the principle of converting electrical energy to a laser light output. The first gas laser, the Helium–neon laser (HeNe), was co-invented by Iranian-Azerbaijani physicist Ali Javan and American physicist William R. Bennett, Jr. in 1960. It produced a coherent light beam in the infrared region of the spectrum at 1.15 micrometres.

Gas lasers using many gases have been built and used for many purposes.

Specifications:

1. Physical properties

2. Typical technical data (COA)

3. Package

Applications:

Krypton Neon Mixtures are used in 248 nm lithography applications, usually in conjunction with a
halogen gas mixture.