248 nm Lithography Carbon Dioxide Lasers Krypton Neon Mixtures

248 nm Lithography Carbon Dioxide Lasers Krypton Neon Mixtures

Description:

Krypton Neon Mixtures are used in 248 nm lithography applications, usually in conjunction with a
halogen gas mixture.

Carbon dioxide lasers, or CO2 lasers can emit hundreds of kilowatts at 9.6 µm and 10.6 µm, and are often used in industry for cutting and welding. The efficiency of a CO2 laser is over 10%.

Carbon monoxide or "CO" lasers have the potential for very large outputs, but the use of this type of laser is limited by the toxicity of carbon monoxide gas. Human operators must be protected from this deadly gas. Furthermore, it is extremely corrosive to many materials including seals, gaskets, etc.

Gas lasers using many gases have been built and used for many purposes.

Specifications:

1. Physical properties

2. Typical technical data (COA)

3. Package

Applications:

Krypton Neon Mixtures are used in 248 nm lithography applications, usually in conjunction with a
halogen gas mixture.